[26a-E203-1~11] 15.4 III-V-group nitride crystals

[26a-E203-2] The fabrication and evaluation of high efficiency 230nm LED using reflective PhC

〇Yukio Kashima¹, Eriko Matsuura², Masafumi Jo¹, Noritoshi Maeda¹, Hidetoshi Shinohara³, Kanji Furuta⁴, Ryuichirou Kamimura⁴, Yohei Aoyama⁵, Takeshi Iwai⁵, Tsumugu Nagano⁶, Hiroyuki Oogami⁷, Yasushi Iwaisako⁷, Kazuki Iimura⁸, Hideki Hirayama¹ (1.RIKEN, 2.Marubun, 3.Shibaura Machine, 4.ULVAC, 5.TOK, 6.DNP, 7.Nippon tangsten, 8.Farmloyd)

Keywords:230nm UVC-LED, photonic crystal, light extraction efficiency

As 230nm-LED increases an alminium composition ratio moe than 80%,TM light is emitted laterally from the LED and the light extract efficiency(LEE) is decreased to 1.3%. We fabricated and evaluated the LED by using a reflective photonic crystal forming in p-GaN contact layer in order to increase LEE.