[26a-E301-1~9] 3.13 Semiconductor optical devices

[26a-E301-2] Design and fabrication of ultra-low voltage quantum well microring optical modulator for superconducting integrated circuit optical interconnection

〇(M2)Yuta Kaneko¹, Yoshikawa Nobuyuki¹, Arakawa Taro¹ (1.YokohamaNational Univ.)

Keywords:semiconductor

Nb-based superconducting integrated circuits, which operate at cryogenic temperatures of 4.2 K, are capable of ultrafast operation at tens of GHz with extremely low power consumption. However, its voltage output is small (sub-mV) and requires a voltage booster circuit for connection in hybrid systems with CMOS memory, resulting in reduced speed, poor integration, and increased power consumption. In this study, we aim to realize a high-speed optical interconnection between a superconducting integrated circuit and a CMOS memory, and to realize an optical modulator driven by a voltage as low as mV at cryogenic temperatures. We report on the ultra-low voltage drive and grating coupler (GC) theory of a double-micro-ring loaded Mach-Zehnder type optical modulator (D-MRR MZM) with multiple quantum well (MQW) core layers.