[26a-E302-1~11] 3.8 Optical measurement, instrumentation, and sensor

[26a-E302-3] Nano-step Measurement by Camera Observation system with Polarization Distribution Converter

〇(PC)Keisuke Yoshiki¹ (1.Univ. of Hyogo)

Keywords:liquid crystal, spatial polarization converter, surface topography

we have added the ability to measure the minute irregularities of the observed object by attaching a device to the camera that converts the polarization distribution of the beam. By measuring the degree to which the reflected light preserves the polarization distribution of the incident beam, it is possible to detect minute changes in the sample surface. The light path changes caused by small steps on the sample surface were converted to light intensity and imaged by this system. As a result, we confirmed the detection of steps of 10 nm or less, and also found that it is possible to measure steps on the micrometer scale.