[26a-P03-1~15] 8 Plasma Electronics(Poster)

[26a-P03-1] Synthesis of ZnO fine particles by plasma-assisted inkjet process

〇(M1)Takeru Hato¹, Kaishu Nitta¹, Hitoshi Muneoka¹, Yoshiki Shimizu², Kazuo Terashima^1,2, Tsuyohito Ito^1,2 (1.The Univ. of Tokyo, Grad. Sch. of Frontier Sci., 2.AIST)

Keywords:plasma, ZnO, synthesis of particle