[26a-P04-1~17] 12.1 Fabrications and Structure Controls

[26a-P04-6] Fabrication of Nanoscale Multilayered Structure of Onorganic-Inorganic Hybrid Polymer Thin Films by Ion-Assisted Vapor-Deposition Polymerization

〇(M2)Takumi Miyayama¹, Hiroaki Usui¹ (1.Tokyo Univ of Agri and Tech)

Keywords:Vacuum deposition, Nanoscale Multilayered Structure, Onorganic-Inorganic Hybrid