[26p-E104-1~11] 15.7 Crystal characterization, impurities and crystal defects

[26p-E104-10] High sensitivity infrared absorption spectroscopy and infrared defect dynamics of silicon crystal
(20) Database of local vibration modes of N-complexes

〇Naohisa Inoue¹, Shuichi Kawamata¹, Shuichi Okuda¹ (1.Osaka Pref. Univ. Radiation Research Center)

Keywords:silicon crystal, nitrogen, infrared absorption

Nitrogen makes many complexes with oxygen (O) and intrinsic point defects of vacancy (V) and self-interstitial (I). The complexes were found and assigned by infrared absorption spectroscopy (IR) of local vibration modes (LVM). More than 15 complexes and 20 LVMs are summarized in a Table as the database.: NN-O group, NO-O group, Ni-O group, VNs, VNN, and VVNN. Some LVMs are not assigned yet. Rough estimation of complex concentration in as-grown Si is shown in the Table (for total concentration of 4x1015/cm3, solubility limit at melting point). Concentration of seven species in as-grown Si is estimated.