[26p-E301-1~12] 3.13 半導体光デバイス

▼ [26p-E301-3] 1060nm Single-mode Transverse Coupled Cavity VCSEL with Surface Relief Engineering for High-speed Modulation

〇(P)Shanting Hu¹、Xiaodong Gu¹、Hameeda R Ibrahim¹、Masanori Nakahama¹、Fumio Koyama¹ (1.Tokyo Inst. Tech.)

キーワード：Vertical cavity surface emitting lasers

A vertical-cavity surface-emitting laser (VCSEL) is widely regarded as a key light source in supercomputers, data centers, and access/metro/core networks, in particular for short reach applications.However, the modulation speed of VCSELs is limited by their relaxation oscillation frequency to typically less than 20 GHz. In this paper, we propose and demonstrate 1060nm VCSELs with surface relief engineering, showing single-mode operation and high modulation speed. Thanks to the optical-transverse resonance brought by the shallow etching of a semiconductor surface, clear eye opening was observed up to 54 Gbps NRZ and 80 Gbps PAM4 modulations. Single mode operations with SMSR of more than 30 dB in the entire current pump range were also realized