[26p-E304-1~10] 12.2 Characterization and Materials Physics

[26p-E304-9] MEMS Sensor Driven Phase Transition of Liquid Crystals Observed by Thermal Diffusivity

〇Hiroki Fujisawa¹, Meguya Ryu², Junko Morikawa¹ (1.Tokyo Tech, 2.AIST)

Keywords:thermal diffusivity, MEMS, liquid crystals

Due to the developent of information and communication technology in recent years, the importance of material development on a micro scale has increased. Along with this, miniaturization of the measurement method is also required. With temperature wave analysis (TWA) method, thermal diffusivity of liquid crystals and polymers during phase transition and micro scale single crystals have been measured. In this study, thermal diffusivity of liquid crystals were measured with TWA method by fabricating a micro temperature sensor with MEMS teqniques.