[26p-F308-1~4] 7.3 Micro/Nano patterning and fabrication

[26p-F308-3] Study on Release Process for Tilted Diffraction Patterns for Smart Glasses

Ryuhei Yamamura¹, Yusei Kunitou¹, Kai Kameyama¹, Masaaki Yasuda¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

Keywords:nanoimprint, demolding, tilted structuer

Smart glasses for VR (virtual reality) and AR (augmented reality) have been developed with thin-film reflective/transmissive mirrors by using grating with tilted structures. Nanoimprinting has been used in some cases as a fabrication method for such optical structures, but the release process of the tilted structure is one of the keys. Here, we use numerical simulations to study the damage caused by the release process of the tilted structure. Peel removal (lifting the left edge) in the opposite direction (left to right) to the pattern inclination (left direction) results in lower strain in the resist and mold than removal from the opposite direction (right edge). Also, the closer the modulus ratio of the materials is to 1, the lower the strain on both sides.