Sri Ayu Anggraini

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PB01 (Poster)

Poster presentation
| 9 Applied Materials Science
| 9.1 Dielectrics, ferroelectrics

[17p-PB01-1~4] 9.1 Dielectrics, ferroelectrics

1:30 PM - 3:30 PM

▲ [17p-PB01-4] Effect of addition of elements in group IVB (C, Si, Ge, Sn) on polarity inversion of Scandium Aluminum Nitride (ScAlN) piezoelectric thin films

〇Sri Ayu Anggraini¹, Masato Uehara¹, Kenji Hirata¹, Hiroshi Yamada¹, Morito Akiyama¹ (1.AIST)