Zhi Cao

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:15 PM - 5:30 PM D511 (Building No. 11)

Oral presentation
| 22 Joint Session M
| 22.1 Joint Session M "Phonon Engineering"

[17p-D511-1~15] 22.1 Joint Session M "Phonon Engineering"

2:15 PM - 2:30 PM

[17p-D511-5] Evaluation of Interfacial Thermal Resistance between Low-K Interlayer Dielectric materials and Metal Wiring

〇(M1)Zhi Cao¹, Mao Xu², Tianzhuo Zhan³, Takanobu Watanabe¹ (1.Waseda Univ., 2.Tokyo Tech., 3.Toyo Univ.)