Sho Tanaka

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:30 PM A404 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[15p-A404-1~19] 6.1 Ferroelectric thin films

3:00 PM - 3:15 PM

△ [15p-A404-9] Effects on Electrical Characteristics of Hf_0.5Zr_0.5O₂ Ferroelectric Thin Films by Applying Several Kind of Electric Field during RTA

〇(M2)Sho Tanaka¹, Takumi Hayakawa¹, Minoru Noda¹ (1.Kyoto Inst. Tech.)