Naohito Miyata

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:15 PM - 4:30 PM

[16p-A403-11] Ta oxide film growth by electrochemical oxidation method and its application to ReRAM

〇(M1C)Naohito Miyata¹, Yoshiaki Ishii¹, Masao takahashi¹, masahiro Moniwa¹ (1.Tokyo Univ. of Technology)