Sho Yamagata

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA04 (Poster)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[16p-PA04-1~24] 13.7 Compound and power devices, process technology and characterization

1:30 PM - 3:30 PM

[16p-PA04-10] Formation and characterization of SiO₂ by Atomic-Species-Enhanced Chemical Vapor Deposition (2)

〇Sho Yamagata¹, Ryota Ouchi¹, Sogo Shikata¹, Masakazu Furukawa², Akihiro Wakahara¹, Hiroshi Okada¹ (1.Toyohashi Univ. Tech., 2.Aries Research Limited Company)