Yuki Nakaizumi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 3:30 PM PB03 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PB03-1~15] 8 Plasma Electronics (Poster)

1:30 PM - 3:30 PM

[15p-PB03-14] RF power dependence of SiO:CH films deposited from TMVS

〇Yuki Nakaizumi¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)