Naoki Imaizumi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:15 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[15p-A403-1~16] 13.2 Exploratory Materials, Physical Properties, Devices

2:30 PM - 2:45 PM

[15p-A403-7] Reactive Ion Etching Property of Mg₂Si Substrates by CF₄/Ar

〇Naoki Imaizumi¹, Rikuto Nakamura¹, Misa Yoshida², Daiju Tsuya², Haruhiko Udono¹ (1.Ibaraki Univ., 2.NIMS)