JIALUN CAI

→ Search for JIALUN CAI in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA06 (Poster)

Poster presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[15p-PA06-1~4] 15.5 Group IV crystals and alloys

4:00 PM - 6:00 PM

▲ [15p-PA06-2] Formation of SiO₂ Layer on SiGe/Si Nano-structures using Plasma-enhanced Atomic Layer Deposition

〇JIALUN CAI¹, NORIYUKI TAOKA¹, KATSUNORI MAKIHARA¹, AKIO OHTA¹, SEIICHI MIYAZAKI¹ (1.Nagoya Univ.)