Keita Kuohara

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 10:45 AM B414 (Building No. 2)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[17a-B414-1~7] 17.3 Layered materials

9:00 AM - 9:15 AM

[17a-B414-1] Sheet resistance reduction of sputtered WS₂ film by Cl₂ plasma treatment

〇(B)Keita Kuohara¹, Shinya Imai¹, Shigetaka Tomiya¹, Tetsuya Tatsumi¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech)