Junji Senzaki

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:30 AM - 11:30 AM A301 (Building No. 6)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-A301-1~8] 15.6 Group IV Compound Semiconductors (SiC)

10:45 AM - 11:00 AM

[15a-A301-6] Development of 3-channel Inspection Analysis Technique for Defects of SiC Epitaxial Wafers using Optical Inspection, Photoluminescence and X-ray Topography

〇Junji Senzaki¹, Junichi Nishino¹, Tsutomu Osanai¹, Hiroshi Yamaguchi¹ (1.AIST)