Fumihiro Fujie

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:30 AM - 11:30 AM A301 (Building No. 6)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-A301-1~8] 15.6 Group IV Compound Semiconductors (SiC)

11:15 AM - 11:30 AM

△ [15a-A301-8] Studies on Warpage and Basal Plane Dislocation of Thick SiC Epitaxial Wafers with a Diameter of 150 mm

〇Fumihiro Fujie¹, Koichi Murata¹, Tsubasa Shiono², Naoto Ishibashi², Yuichiro Mabushi², Hidekazu Tsuchida¹ (1.CRIEPI, 2.Resonac Corp.)