Takeshi Hamamoto

→ Search for Takeshi Hamamoto in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

[15a-B410-3] Investigation of Shrinkage of Overlap Length of SOI CMOS of Minimal Fab

〇Takeshi Hamamoto¹, Yuji Kitayama³, Satoshi Maruyama³, Sommawan Khumpuang^1,2, Yasunari Shiba³, Shiro Hara^1,2,4 (1.MINIMAL, 2.AIST, 3.Yokogawa Solution, 4.Hundred)

▲