Hiroyuki Tanaka

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[15a-B410-5] Study on taper angle control in Silicon via hole etching

〇Hiroyuki Tanaka¹, Hiroshi Tokunaga², Yoshiyuki Nozawa³, Toshihiro Hayami³, Khumpuang Sommawan^1,4, Shiro Hara^1,4,5 (1.AIST, 2.MTC, 3.SPPT, 4.MINIMAL, 5.Hundred)

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