Masashi Kase

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[15a-B410-8] Stabilization of phosphorus diffusion in P-SOG process in Minimal Fab

〇Masashi Kase¹, Khumpuang Sommawan^1,2, Shirou Hara^1,2,3 (1.AIST, 2.MINIMAL, 3.HUNDRED)