Daiki Nakamura

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 10:30 AM - 11:45 AM D209 (Building No. 11)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15a-D209-1~5] 7.3 Micro/Nano patterning and fabrication

11:15 AM - 11:30 AM

[15a-D209-4] Hybrid simulation of stochastic method and molecular dynamics of electron beam lithography for chemically amplified resists

〇Daiki Nakamura¹, Kaito Yamada¹, Bunta Inoue¹, Masaaki Yasuda¹ (1.Osaka Met. Univ.)