Toshiyuki Horiuchi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 10:30 AM - 11:45 AM D209 (Building No. 11)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15a-D209-1~5] 7.3 Micro/Nano patterning and fabrication

11:30 AM - 11:45 AM

[15a-D209-5] Feasibility of Stereophonic Parabolic-Mirror Projection-Exposure Using a Flat Reticle

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)