kouji kobayashi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 12:00 PM D511 (Building No. 11)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[15a-D511-1~11] 15.7 Crystal characterization, impurities and crystal defects

11:45 AM - 12:00 PM

[15a-D511-11] TCAD Simulation Analysis of Recrystallization Behavior on Hydrocarbon-Molecular-Ion-Implanted Silicon wafer Surface

〇kouji kobayashi¹, Ryosuke Okuyama¹, Takeshi Kadono¹, Ayumi Masada¹, Ryo Hirose¹, Akihiro Suzuki¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)