Hiroya Iwashiro

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 12:00 PM D511 (Building No. 11)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[15a-D511-1~11] 15.7 Crystal characterization, impurities and crystal defects

10:30 AM - 10:45 AM

[15a-D511-6] Theoretical Study on Binding of Vacancy-Oxygen Complex (VO₄) to Metals in RTP Wafers

〇Hiroya Iwashiro¹, Haruo Sudo¹, Ken Hayakawa¹, Eiji Kamiyama¹ (1.Global Wafers Japan Co., Ltd.)