Ryo Hirose

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 12:00 PM D511 (Building No. 11)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[15a-D511-1~11] 15.7 Crystal characterization, impurities and crystal defects

11:00 AM - 11:15 AM

[15a-D511-8] Gettering Mechanisms of Silicon Hydride and Hydrocarbon Hybrid-Molecular-Ion-Implanted Silicon Epitaxial Wafer

〇Ryo Hirose¹, Ayumi Onaka-Masada¹, Ryosuke Okuyama¹, Takeshi Kadono¹, Koji Kobayashi¹, Akihiro Suzuki¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)

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