Rajasekaran Palani

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:15 AM - 12:00 PM E102 (Building No. 12)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-E102-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:45 AM - 11:00 AM

[15a-E102-6] Effects of Postannealing on the Properties of Transparent Conductive
W-Doped In₂O₃ Films/glass substrates

〇(PC)Rajasekaran Palani¹, Yugo Okada², Makoto Maehara², Hisashi Kitami^1,2, Shintaro Kobayashi³, Katsuhiko Inaba³, Hisao Makino¹, Kimio Kinoshita², Tetsuya Yamamoto¹ (1.Kochi Univ. Tech., Res. Inst., 2.Sumitomo Heavy Industries, Ltd., 3.Rigaku Corp.)