Keiko Masumoto

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A301 (Building No. 6)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15p-A301-1~13] 15.6 Group IV Compound Semiconductors (SiC)

4:30 PM - 4:45 PM

[15p-A301-13] Influence of TSD density of the substrate on the occurrence of 3C-inclusions for the 4H-SiC on-axis epitaxial layers

〇Keiko Masumoto¹, Kazutoshi Kojima¹, Yasunori Tanaka¹ (1.AIST)