Kaname Imokawa

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[16p-A301-7~12] 13.7 Compound and power devices, process technology and characterization

5:15 PM - 5:30 PM

[16p-A301-12] Formation of low resistance 4H-SiC n-type layer by laser doping
Study of Laser Doping Mechanism (part 5)

〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Yasutsugu Usami¹ (1.Gigaphoton Inc.)

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A301 (Building No. 6)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15p-A301-1~13] 15.6 Group IV Compound Semiconductors (SiC)

3:30 PM - 3:45 PM

[15p-A301-9] Study on Four-point probe Measurement of SiC Substrates in Laser Doping

〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Yasutsugu Usami¹, Rei Hobara², Shuji Hasegawa² (1.Gigaphoton Inc., 2.Tokyo Univ.)