Haruhiko Ito

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

4:00 PM - 4:15 PM

[15p-A408-12] Fabrication of hydrogenated amorphous carbon nitride films with high nitrogen content using the RF plasma CVD of the gas mixtiure of C₂H₂, N₂, and Ar

〇Haruhiko Ito¹, Ryota Watanuki¹, Tsuneo Suzuki¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ Tech)