Dingyue Qu

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:10 PM - 6:00 PM A502 (Building No. 6)

Oral presentation
| 3 Optics and Photonics
| 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[15p-A502-1~18] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

4:45 PM - 5:00 PM

[15p-A502-14] Deep etching of SOI substrate and chip bonding

〇Dingyue Qu¹, Takumi Takahashi¹, Yuichi Matsushima¹, Hiroshi Ishikawa¹, Katsuyuki Utaka¹ (1.Waseda Univ.)