Shogo Uebayashi

→ Search for Shogo Uebayashi in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:45 PM B309 (Building No. 2)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[15p-B309-1~19] 8.1 Plasma production and diagnostics

4:30 PM - 4:45 PM

△ [15p-B309-12] Measurement of atomic nitrogen density in a miniature ECR nitrogen plasma by VUV absorption spectroscopy –toward estimati on of adsorption probability of reactive nitrogen species–

〇(M1)Shogo Uebayashi¹, Koichi Sasaki¹, Lu Bang², Satoru Takakusagi², Kiyotaka Asakura² (1.School of Eng,Hokkaido Univ., 2.Institute for Catalysis,Hokkaido Univ.)

▲