Yuya Yamashita

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:45 PM B309 (Building No. 2)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[15p-B309-1~19] 8.1 Plasma production and diagnostics

2:45 PM - 3:00 PM

△ [15p-B309-6] 【Highlighted Presentation】Diagnosis of Spatial Distribution of Electron Temperature and Electron Density of Argon Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement

〇(DC)Yuya Yamashita¹, Kenta Doi², Tetsuji Kiyota², Keiichiro Asakawa², Sotaro Hosoya¹, Wataru Kikuchi¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.ULVAC)

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