Hiromasa Murata

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 4:45 PM D209 (Building No. 11)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[15p-D209-1~12] 7.2 Applications and technologies of electron beams

3:30 PM - 3:45 PM

[15p-D209-8] Investigation of TiN coating on Si emitter for realization of high current electron source

〇Hiromasa Murata¹, Katsuhisa Murakami¹, Masayoshi Nagao¹ (1.AIST)