Yuya Yamane

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 6:15 PM E102 (Building No. 12)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15p-E102-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

3:45 PM - 4:00 PM

△ [15p-E102-9] Investigation of amorphous-InGaZnO sheet resistance reduction technique using a hot ion-implantation method

〇Yuya Yamane¹, Keisuke Yasuta¹, Toshimasa Ui¹, Junichi Tatemichi¹ (1.Nissin Ion Equipment)