Yasunori Ohtsu

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA02 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PA02-1~12] 8 Plasma Electronics (Poster)

4:00 PM - 6:00 PM

[15p-PA02-2] Production of high-density hydrogen plasma by radio-frequency hybrid-discharge for thin film preparation

〇Yasunori Ohtsu¹, Tatsuo Tabaru² (1.Saga Univ., 2.AIST)