Masanori Shinohara

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA02 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PA02-1~12] 8 Plasma Electronics (Poster)

4:00 PM - 6:00 PM

[15p-PA02-4] Effects of plasma-generation power on chemical states of films, deposited during acetylene plasma

Tatsuya Nakai¹, Atsuya Kuwada¹, Yuto Ooishi¹, Ryo Sasamoto¹, 〇Masanori Shinohara¹, Satoshi Tanaka², Takashi Matsumoto² (1.Fukuoka Univ., 2.Tokyo Electron Technology Solutions Limited)

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