The 70th JSAP Spring Meeting 2023

Kosuke Takenaka

Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 3:30 PM PB03 (Poster)

  • Poster presentation
  • | 8 Plasma Electronics
  • | 8 Plasma Electronics (Poster)

Fri. Mar 17, 2023 9:00 AM - 11:30 AM A205 (Building No. 6)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment