Takeo Nakano

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 3:30 PM PB03 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PB03-1~15] 8 Plasma Electronics (Poster)

1:30 PM - 3:30 PM

[15p-PB03-7] Control of Cu film structure prepared by dual bipolar HPPMS

Takuya Ohba¹, 〇Takeo Nakano¹, Md. Suruz Mian¹ (1.Seikei Univ.)