Tsuyoshi Horikawa

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:45 AM A409 (Building No. 6)

Oral presentation
| 3 Optics and Photonics
| 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[16a-A409-1~10] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

10:45 AM - 11:00 AM

[16a-A409-7] Variation Analysis for Splitting Ratio of Directional Coupler
Based on Waveguide Process Monitoring

〇Tsuyoshi Horikawa¹, Nobuhiko Nishiyama^1,2,3 (1.School of Engineering, Tokyo Institute of Technology, 2.IIR, Tokyo Institute of Technology, 3.PETRA)