Masahito Takakuwa

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B409 (Building No. 2)

Oral presentation
| 12 Organic Molecules and Bioelectronics
| 12.3 Functional Materials and Novel Devices

[16a-B409-1~9] 12.3 Functional Materials and Novel Devices

11:15 AM - 11:30 AM

[16a-B409-9] Evaluation of the heating condition for the parylene low-temperature direct bonding

〇Masahito Takakuwa^1,2, Daishi Inoue², Kenjiro Fukuda², Tomoyuki Yokota³, Shinjiro Umezu¹, Takao Someya^2,3 (1.Waseda Univ., 2.RIKEN, 3.Univ. of Tokyo)

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