Zeyu Gu

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

△ [16a-B410-1] Fabrication and Characterization of Ni-W Films via Pulsed Reverse Plating

〇Zeyu Gu¹, Yiming Jiang¹, Tomoyuki Kurioka¹, Chun-Yi Chen¹, Masato Sone¹, Chang Tso-Fu Mark¹ (1.Tokyo Tech)