Kisuke Miyado

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

△ [16a-B410-6] Design of serpentine spring for MEMS devices by gold multi-layer metal technology

〇(B)Kisuke Miyado¹, Akira Onishi¹, Devi Srujana Tennteni¹, Katsuyuki Machida¹, Parthojit Chakraborty¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

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