Yoshimasa Akamatsu

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

△ [16a-B410-9] Frequency response of MEMS beams fixed at both ends

〇(B)Yoshimasa Akamatsu¹, Kensuke Kanda¹, Kazusuke Maenaka¹ (1.Univ.Hyogo)