Kohdai Sakuta

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 12:45 PM D519 (Building No. 11)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.4 &7.5

[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

11:45 AM - 12:00 PM

△ [16a-D519-11] Ni pattern etching by O₂-GCIB and reactive gas adsorption

〇Kohdai Sakuta¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Hyogo Univ.)