Reo Terauchi

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:30 AM - 11:30 AM PA06 (Poster)

Poster presentation
| 3 Optics and Photonics
| 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[16a-PA06-1~13] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

9:30 AM - 11:30 AM

[16a-PA06-10] Development of a laser-based inspection method for micro semiconductor chips

〇Reo Terauchi¹, Katsuhiro Mikami¹, Tetsuya Matsuyama¹, Kenichi Ikeda², Yusuke Nakaminami², Masanori Otake² (1.Kindai Univ., 2.Opto Systems Co., LTD)