Yoshito Onishi

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:30 AM - 11:30 AM PA06 (Poster)

Poster presentation
| 3 Optics and Photonics
| 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[16a-PA06-1~13] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

9:30 AM - 11:30 AM

[16a-PA06-12] Establishment of Discrimination Method between Artificial Structure and Defect in Appearance Defect Inspection with Phase Shift Illumination Method

〇Yoshito Onishi¹, Yoshiho Seo¹, Masaoki Matsuoka², Shigeru Serikawa³, Ken Tsugane² (1.Hitachi, Ltd., 2.Hitachi High-Tech Corporation, 3.Hitachi High-Tech Solutions Corporation)

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