Takayuki Hagiwara

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

5:15 PM - 5:30 PM

[16p-A403-15] Step coverage of Al₂O₃ film by ALD using high purity ozone

〇Takayuki Hagiwara¹, Soichiro Motoda¹, Naoto Kameda¹, Ken Nakamura², Hidehiko Nonaka² (1.MEIDEN NPI INC., 2.AIST)